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公开(公告)号：US20210146481A1
公开(公告)日：2021-05-20
申请号：US17162510
申请日：2021-01-29
Inventor： Masatoshi NISHIO , Jingbo WANG , Hitoshi NISHIMURA , Motoki MORIOKA
IPC: B23K26/70 , B23K26/06 , B23K26/38 , B23K26/082
Abstract: A first detector detects an output of a reflected beam from an exit end surface of a first parallel plate. A determination unit determines that an abnormality occurs in the first parallel plate when the detection value of the first detector is smaller than a predetermined determination threshold.
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