公开(公告)号：US20250093143A1

公开(公告)日：2025-03-20

申请号：US18964750

申请日：2024-12-02

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： TATSUYA SAKUMA

IPC: G01B5/20 ,  G01B5/012

Abstract: A shape measurement method of the present disclosure is configured to measure a three-dimensional shape of a surface of a measurement object, the shape measuring method including the steps of: dividing the surface of the measurement object into a plurality of measurement regions; acquiring a plurality of sets of partial measurement data; calculating a first coordinate transformation parameter for performing global alignment of the plurality of sets of partial measurement data; acquiring error calculation data including a normal line at each of a plurality of measurement points of the plurality of sets of partial measurement data; extracting an overlapping region based on the plurality of sets of partial measurement data and the first coordinate transformation parameter; calculating a second coordinate transformation parameter for performing local alignment of the plurality of sets of partial measurement data based on the error calculation data in the extracted overlapping region; and generating composite data by combining the plurality of sets of partial measurement data based on the first coordinate transformation parameter and the second coordinate transformation parameter.