公开(公告)号：US20220203471A1

公开(公告)日：2022-06-30

申请号：US17543640

申请日：2021-12-06

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： YOSHIKI MATSUMOTO ,  NAOSHI YAMAGUCHI ,  TOSHIRO KANDA ,  YASUYUKI TAKANO

IPC: B23K1/018 ,  B03C3/013 ,  B03C3/38 ,  B03C3/36 ,  H01T19/04

Abstract: A product removing method of introducing an atmospheric gas into a product remover including a corona discharge space to remove a product from the atmospheric gas, the product being generated inside a processing chamber under a low oxygen atmosphere, the method including: mixing the atmospheric gas with a high electric resistance gas to generate a mixed gas in a pipe or the corona discharge space, the pipe being connected between the processing chamber and the corona discharge space, the atmospheric gas being discharged from the processing chamber via the pipe, the high electric resistance gas having an electric resistance higher than an electric resistance of the atmospheric gas; and removing the product from the mixed gas by a corona discharge method in the corona discharge space into which the mixed gas is introduced via the pipe or in which the mixed gas is generated.