公开(公告)号：US20220326183A1

公开(公告)日：2022-10-13

申请号：US17635118

申请日：2020-08-25

申请人： Parker-Hannifin Corporation

发明人： Raghujit Prasad KUNAPULI ,  Praveen THALLAPALLY ,  Peter B. MCGRAIL ,  Deng ZHIQUN ,  Jian LIU ,  Huidong LI ,  Jun LU ,  Debasis BANERJEE

IPC分类号： G01N29/02

摘要： A SAW sensor is optimized for detection of refrigerant leakage in a refrigerant system or other gases, vapors, explosives or chemicals of interest. The SAW sensor includes a piezoelectric substrate; an interdigitated transducer deposited on the piezoelectric substrate, the interdigitated transducer having an input portion that receives input surface acoustic waves and an output portion that emits output surface acoustic waves; and a refrigerant sensor film located between the input portion and the output portion of the interdigitated transducer, the refrigerant sensor film including a sorbent material that is selected for preferential adsorption of a target refrigerant over atmospheric gases. Adsorption of the target refrigerant by the sorbent material results in a frequency shift of a frequency of the output surface acoustic waves relative to a frequency of the input surface acoustic waves. The sorbent material may be a metal organic framework (MOF) material, a covalent organic framework (COF) material, a porous organic cage or organic macrocyles such as calix [n] arene and its related derivatives.