公开(公告)号：US07003192B2

公开(公告)日：2006-02-21

申请号：US10305158

申请日：2002-11-27

申请人： Paul Blair ,  Jean Podlecki ,  Mark Lawrence Begbie ,  Geradus Johannes Burger

发明人： Paul Blair ,  Jean Podlecki ,  Mark Lawrence Begbie ,  Geradus Johannes Burger

IPC分类号： G02B6/26 ,  G02B6/42

CPC分类号： G02B6/3582 ,  G02B6/266 ,  G02B6/3514 ,  G02B6/353 ,  G02B6/3546 ,  G02B6/355 ,  G02B6/3552 ,  G02B6/3592 ,  G02B6/3594 ,  G02B6/3596

摘要： A hybrid optical component is described incorporating a planar lightguide circuit (PLC) chip 2 having at least two waveguides provided thereon which are separated by a trench, and a MEMS chip 3 attached to the PLC chip and incorporating a MEMS element displaceable relative to the trench so as to control the passage of an optical signal between the two waveguides. A cap 4 is sealingly engaged with the PLC chip 2 to form a housing therewith which houses said MEMS chip 3 hermetically therein. The component may act as a variable optical attenuator (VOA) device in which a MEMS shutter attenuates an optical signal passing between two waveguides, or may be an optical switch in which a MEMS mirror is used to switch an optical signal from a first waveguide between at least two other waveguides which intersect with the first waveguide at the trench.