公开(公告)号：US06261494B1

公开(公告)日：2001-07-17

申请号：US09176789

申请日：1998-10-22

申请人： Paul M. Zavracky ,  Rick H. Morrison ,  Keith Warner ,  Nicol E. McGruer

发明人： Paul M. Zavracky ,  Rick H. Morrison ,  Keith Warner ,  Nicol E. McGruer

IPC分类号： C04B3500

CPC分类号： G02B26/0841 ,  B81B3/0021 ,  B81B2201/042 ,  G01P15/0802

摘要： A method of creating plastically deformed devices which have a three dimensional aspect. Micromechanical structures are created from a material which is plastically deformable and then a section of the structure is bent to an out-of-plane position and can be maintained there without being supported by other mechanical devices such as latches or hinges. The bending of the structures may be done mechanically, by electrostatic forces or by magnetic forces. The bending can also be done in a batch mode where a plurality of devices are bent at the same time as part of the same process. Fuses can be utilized to allow only a predetermined number of devices to be bent in batch mode. The fuses are later blown, thereby providing a plurality of devices which are relatively parallel to the substrate as well as a plurality of devices which are generally out-of-plane with respect to the substrate.

摘要翻译： 一种产生具有三维方面的塑性变形装置的方法。 微机械结构由塑性变形的材料制成，然后将结构的一部分弯曲到平面外的位置，并且可以保持在其上，而不被诸如闩锁或铰链的其它机械装置支撑。 结构的弯曲可以通过静电力或磁力机械地进行。 弯曲也可以以分批模式进行，其中多个装置同时作为相同工艺的一部分而弯曲。 可以使用保险丝来仅允许以批量模式弯曲预定数量的装置。 熔丝随后被吹制，从而提供多个与基板相对平行的装置，以及多个相对于基板超出平面的装置。