公开(公告)号：US20070261559A1

公开(公告)日：2007-11-15

申请号：US11430614

申请日：2006-05-09

申请人： Peter Maroulis ,  Suhas Ketkar ,  Wayne McDermott

发明人： Peter Maroulis ,  Suhas Ketkar ,  Wayne McDermott

IPC分类号： B01D46/00

CPC分类号： C23C16/4402 ,  G01N1/2205 ,  G01N2001/105

摘要： An improved process for supplying to a processing apparatus a gas containing at least one impurity that reacts and/or nucleates to form contaminating particles suspended in the gas is disclosed. The improvement includes sampling a flow of the gas upstream of the processing apparatus with a particle counter and/or particle capture filter to detect an amount of the contaminating particles in the flow of the gas, and generating a signal when the amount of particles is in excess of a predetermined amount. An apparatus for performing the process includes: a supply source; at least one processing tool; a particle counter upstream of the processing tool and downstream of the supply source; a microprocessor in electrical communication with at least the particle counter; and optionally a particle capture filter in parallel with the particle counter. The process and apparatus are useful in the manufacture of integrated circuits.

摘要翻译： 公开了一种用于向处理装置供应包含至少一种使得在气体中悬浮的污染颗粒反应和/或成核以形成杂质的气体的改进方法。 该改进包括用颗粒计数器和/或颗粒捕获过滤器在处理装置上游对气体进行采样，以检测气体流中的污染颗粒的量，并且当颗粒的量处于 超过预定量。 一种用于执行该处理的装置，包括：供应源; 至少一个处理工具; 处理工具上游的粒子计数器，并在供给源的下游; 至少与微粒计数器电通信的微处理器; 以及任选地与颗粒计数器平行的颗粒捕获过滤器。 该方法和装置在集成电路的制造中是有用的。