公开(公告)号：US6030167A

公开(公告)日：2000-02-29

申请号：US905802

申请日：1997-08-12

申请人： Peter Yu-Tsai Lin ,  Eric Chu

发明人： Peter Yu-Tsai Lin ,  Eric Chu

IPC分类号： B65G49/07 ,  C30B35/00 ,  F27D3/00

CPC分类号： C30B35/005 ,  Y10S414/14

摘要： An apparatus for loading wafers into horizontal quartz tube, the apparatus includes a base plate, holding plate, trolley main body and two supporting bases. The base plate has a plurality of stages, which is lifted by a loading rod and fixed atop thereon, for placing wafers. The holding plate has a plurality of fixing screws and altitude adjusting screws for supporting the base plate and changing an altitude of the base plate to match an altitude of wafer boat. The trolley main body, which supports the holding plate by supporting pillars, provides with a plurality of position holes for carrying the holding plate and moving the base plte. The two supporting bases are connected by a solid plate, whose both ends are respectively attached at hollows formed at the middle of each of the two supporting bases. The two supporting bases are provided with a pair of slide bearings on either side of the solid plate. The slide bearings are fitted with two parallel silde shafts out of the horizontal quartz tube, thereby allowing the two supporting bases to travel along the slide shaft into and out of the horizontal quartz tube. In addition, the supporting bases have several pins adapted to mate with the position holes of the trolley main body to mount the trolley main body on the solid plate, thereby allowing the wafer boat to move along with the two supporting bases.

摘要翻译： 一种用于将晶片装载到水平石英管中的装置，该装置包括基板，保持板，手推车主体和两个支撑底座。 基板具有多个级，其通过装载杆提升并固定在其上，用于放置晶片。 保持板具有多个固定螺钉和高度调节螺钉，用于支撑基板并改变基板的高度以匹配晶片舟的高度。 通过支撑支撑支撑保持板的手推车主体提供了用于承载保持板并移动基座的多个位置孔。 两个支撑基座通过固体板连接，其两端分别附接在形成在两个支撑基座中的每一个的中部的中空处。 两个支撑基座在固体板的任一侧设置有一对滑动轴承。 滑动轴承在水平石英管中装配有两个平行的运动鞋轴，从而允许两个支撑底座沿着滑动轴行进进入和离开水平石英管。 此外，支撑基座具有适于与手推车主体的定位孔配合的多个销，以将手推车主体安装在固体板上，从而允许晶片舟与两个支撑基座一起移动。