公开(公告)号：US20060093298A1

公开(公告)日：2006-05-04

申请号：US11258362

申请日：2005-10-25

申请人： Pietro Montanini ,  Ernestino Galeazzi ,  Paola Palmieri

发明人： Pietro Montanini ,  Ernestino Galeazzi ,  Paola Palmieri

IPC分类号： G02B6/10

CPC分类号： G02B6/1347

摘要： A waveguide core having a high coupling efficiency is disclosed. A method of manufacturing such a waveguide includes successive deposition of multiple layers of silicon dioxide. Deposition of each layer is followed by implantation of dopant impurities in a pre-established area of the layer. After deposition and implantation, high-temperature treatment is performed to diffuse the dopant impurities. The reciprocal position of the pre-established areas and the implantation dosage and energy are selected such that the refractive index of the core in the terminal segment varies gradually in a longitudinal direction, increasing towards the input/output ends of the waveguide.

摘要翻译： 公开了具有高耦合效率的波导芯。 制造这种波导的方法包括多层二氧化硅的连续沉积。 每个层的沉积之后是将掺杂剂杂质植入该层的预先建立的区域。 在沉积和植入之后，进行高温处理以扩散掺杂剂杂质。 选择预先确定的区域的相互位置和植入剂量和能量，使得端子段中的芯的折射率在纵向方向上逐渐变化，朝向波导的输入/输出端增加。