公开(公告)号：US20100097738A1

公开(公告)日：2010-04-22

申请号：US12413005

申请日：2009-03-27

申请人： Pil-Joong KANG ,  Jae-Woo Joung ,  Suk-Ho Song

发明人： Pil-Joong KANG ,  Jae-Woo Joung ,  Suk-Ho Song

IPC分类号： H01L21/683

CPC分类号： H01L21/6831 ,  H01L21/67092

摘要： An electrostatic chuck and a substrate bonding device equipped with the electrostatic chuck are disclosed. The electrostatic chuck in accordance with an embodiment of the present invention includes: an elastic holder, in which a center portion of one surface of the elastic holder is formed in a convex shape; an electrode, which is coupled to the elastic holder such that the elastic holder is electrically charged; and a holding unit, which holds the other surface of the elastic holder. The electrostatic chuck in accordance with an embodiment of the present invention can prevent a defect caused by a void formed between substrates while bonding the substrates.

摘要翻译： 公开了一种静电卡盘和配备有静电卡盘的基板接合装置。 根据本发明的实施例的静电卡盘包括：弹性保持器，其中弹性保持器的一个表面的中心部分形成为凸形; 电极，其连接到弹性保持器，使得弹性保持器带电; 以及保持单元，其保持弹性保持器的另一个表面。 根据本发明的实施例的静电卡盘可以防止在粘合基板时由形成在基板之间的空隙引起的缺陷。

公开(公告)号：US20100096081A1

公开(公告)日：2010-04-22

申请号：US12437082

申请日：2009-05-07

申请人： Pil-Joong KANG ,  Jae-Woo JOUNG ,  Young-Seuck YOO

发明人： Pil-Joong KANG ,  Jae-Woo JOUNG ,  Young-Seuck YOO

IPC分类号： B32B37/06

CPC分类号： B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1634 ,  B41J2002/14403

摘要： Disclosed is a method of manufacturing an ink-jet head including a reservoir storing ink, an inlet port through which the ink is provided to the reservoir, a chamber provided with the ink from the reservoir, a restrictor linking the reservoir and the chamber, and a nozzle through which the ink in the chamber is discharged. The method in accordance with an embodiment of the present invention includes: processing a first plate in which the inlet port is formed; processing a second plate in which the chamber and the inlet port are formed; bonding the first plate on an upper surface of the second plate; processing a third plate in which the restrictor and the reservoir are formed; processing a fourth plate by irradiating a femtosecond laser such that the nozzle is formed; bonding the fourth plate on a lower surface of the third plate, and bonding the third plate on a lower surface of the second plate.

摘要翻译： 公开了一种制造喷墨头的方法，该喷墨头包括存储墨水的储存器，墨水提供给储存器的入口，从储存器设置有墨水的室，连接储存器和室的限流器，以及 一个喷嘴，通过该喷嘴排出腔室中的墨水。 根据本发明的实施例的方法包括：处理其中形成入口的第一板; 处理形成所述室和所述入口的第二板; 将所述第一板接合在所述第二板的上表面上; 处理其中形成限流器和储存器的第三板; 通过照射飞秒激光以形成喷嘴来处理第四板; 将第四板接合在第三板的下表面上，并将第三板接合在第二板的下表面上。

公开(公告)号：US20100097424A1

公开(公告)日：2010-04-22

申请号：US12480234

申请日：2009-06-08

申请人： Pil-Joong KANG ,  Jae-Woo Joung

发明人： Pil-Joong KANG ,  Jae-Woo Joung

IPC分类号： B41J2/14

CPC分类号： B41J2/1433

摘要： An ink-jet head is disclosed. The ink-jet head in accordance with an embodiment of the present invention, including a reservoir, which stores ink, a chamber, which is supplied with the ink from the reservoir, a restrictor, which connects the reservoir with the chamber, a nozzle, which ejects the ink, and a damper, which is interposed between the chamber and the nozzle, can include: a body, in which the chamber, the reservoir, the restrictor and the damper are formed; and a nozzle plate, which is coupled to the body and in which the nozzle is formed on the nozzle plate, in which the nozzle plate is made of a transparent material, and an observation window is formed on the nozzle plate and apart from the nozzle for observation of a meniscus formed in the nozzle.

摘要翻译： 公开了一种喷墨头。 根据本发明的实施例的喷墨头，包括储存油墨的储存器，从储存器供应墨水的储存器，将储存器与室连接的限流器，喷嘴， 其喷射墨水，并且介于腔室和喷嘴之间的阻尼器可以包括：主体，其中形成腔室，储存器，限制器和阻尼器; 以及喷嘴板，其连接到主体并且其中喷嘴形成在喷嘴板上，喷嘴板由透明材料制成，并且在喷嘴板上形成观察窗并与喷嘴分开 用于观察在喷嘴中形成的弯液面。