公开(公告)号：US20230002214A1

公开(公告)日：2023-01-05

申请号：US17939205

申请日：2022-09-07

Applicant: PixArt Imaging Inc.

Inventor： CHIH-MING SUN ,  MING-HAN TSAI ,  YU-TAO LEE

IPC: B81B3/00 ,  H01L27/146 ,  H01L23/00 ,  B81C1/00

Abstract: A MEMS package including a fixed frame, a moveable platform and elastic restoring members is provided. The moveable platform is moved with respect to the fixed frame. The elastic restoring members are connected between the fixed frame and the moveable platform, and used to restore the moved moveable platform to an original position.

公开(公告)号：US20210053817A1

公开(公告)日：2021-02-25

申请号：US17091062

申请日：2020-11-06

Applicant: PixArt Imaging Inc.

Inventor： CHIH-MING SUN ,  MING-HAN TSAI ,  YU-TAO LEE

IPC: B81B3/00 ,  H01L27/146 ,  H01L23/00 ,  B81C1/00

Abstract: A sensor package including a fixed frame, a moveable platform, elastic restoring members and a sensor chip is provided. The moveable platform is moved with respect to the fixed frame, and used to carry the sensor chip. The elastic restoring members are connected between the fixed frame and the moveable platform, and used to restore the moved moveable platform to an original position. The sensor chip is arranged on the elastic restoring members to send detected data via the elastic restoring members.

公开(公告)号：US20200172391A1

公开(公告)日：2020-06-04

申请号：US16783627

申请日：2020-02-06

Applicant: PixArt Imaging Inc.

Inventor： CHIH-MING SUN ,  MING-HAN TSAI ,  YU-TAO LEE

IPC: B81B3/00 ,  H01L27/146 ,  B81C1/00 ,  H01L23/00

Abstract: A sensor package including a fixed frame, a moveable platform, elastic restoring members and a sensor chip is provided. The moveable platform is moved with respect to the fixed frame, and used to carry the sensor chip. The elastic restoring members are connected between the fixed frame and the moveable platform, and used to restore the moved moveable platform to an original position. The sensor chip is arranged on the elastic restoring members to send detected data via the elastic restoring members.