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1.发明授权Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use 有权使用形成为集成电路的压电致动器的变形镜和使用方法公开(公告)号：US07224504B2
公开(公告)日：2007-05-29
申请号：US10629798
申请日：2003-07-30
申请人： Pradeep K Govil , Andrew Guzman
发明人： Pradeep K Govil , Andrew Guzman
IPC分类号： G02B26/08
CPC分类号： G02B26/0825 , G02B26/0841 , Y10S359/90
摘要： A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.
摘要翻译： 可变形光学装置包括具有第一反射表面和第二表面的反射装置，具有支撑装置的致动器（例如，集成电路压电致动器）和从其延伸的可移动延伸部，其连接到第二表面，并且电极耦合 到相应的扩展。 检测波前像差并用于产生控制信号。 基于控制信号移动扩展。 该运动使反射面变形，以校正波前的像差。
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公开(公告)号：US07385750B2
公开(公告)日：2008-06-10
申请号：US10651048
申请日：2003-08-29
CPC分类号： G02B26/0858 , Y10S359/90
摘要： A spatial light modulator (SLM) includes an integrated circuit actuator that can be fabricated using photolithography or other similar techniques. The actuator includes actuator elements, which can be made from piezoelectric materials. An electrode array is coupled to opposite walls of each of the actuator elements is an electrode array. Each array of electrodes can have one or more electrode sections. The array of reflective devices forms the SLM.
摘要翻译： 空间光调制器（SLM）包括可以使用光刻或其它类似技术制造的集成电路致动器。 致动器包括可由压电材料制成的致动器元件。 电极阵列耦合到每个致动器元件的相对的壁是电极阵列。 每个电极阵列可以具有一个或多个电极部分。 反射装置的阵列形成SLM。
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