公开(公告)号：US20130081539A1

公开(公告)日：2013-04-04

申请号：US13650166

申请日：2012-10-12

Applicant: Praxair Technology, Inc.

Inventor： Lloyd Anthony Brown ,  Thomas Justin Thompson

IPC: B01D53/04

CPC classification number: B01D53/0462 ,  B01D53/0438 ,  B01D2257/302 ,  B01D2257/504 ,  B01D2257/80 ,  B01D2258/0216 ,  B01D2259/40098 ,  B01D2259/401 ,  B01J8/0242 ,  B01J8/0285 ,  B01J2208/00061 ,  B01J2208/0015 ,  B01J2208/00212 ,  B01J2208/00407 ,  Y02C10/08

Abstract: The present invention relates to methods and systems for purifying gases, such as for example semiconductor process gases. The invention more particularly relates to fluid purification methods and systems having improved heat transfer capabilities and controls such that the purified fluid produced from the process contains reduced impurity levels and/or exhibits more uniform concentrations within the final product. In another aspect of the invention, the activation time for adsorbent beds used in such processes and systems can be reduced.

Abstract translation: 本发明涉及用于净化气体的方法和系统，例如半导体工艺气体。 本发明更具体地涉及具有改进的热传递能力和控制的流体净化方法和系统，使得由该方法产生的纯化流体含有降低的杂质水平和/或在最终产物内表现出更均匀的浓度。 在本发明的另一方面，可以减少在这些方法和系统中使用的吸附床的活化时间。