Capacitive microelectromechanical switches with dynamic soft-landing
    1.
    发明授权
    Capacitive microelectromechanical switches with dynamic soft-landing 有权
    具有动态软着陆功能的电容式微机电开关

    公开(公告)号:US09536692B2

    公开(公告)日:2017-01-03

    申请号:US14881185

    申请日:2015-10-13

    CPC classification number: H01H59/0009 H03K17/975

    Abstract: A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.

    Abstract translation: 一种基于微机电系统(MEMS)的电气开关。 电开关包括可移动电极,介电层位于电介质层的第一侧上邻近可移动电极并且当可移动电极处于非活动位置时与可移动电极间隔开并且当可移动电极处于与可移动电极接触时 电极处于激活位置,并且在与第一侧相对的第二侧上附着到电介质层的基板,可移动电极被配置为在可动电极在非激活状态下切换之前与电介质层接触时制动 状态和激活状态。

    CAPACITIVE MICROELECTROMECHANICAL SWITCHES WITH DYNAMIC SOFT-LANDING
    2.
    发明申请
    CAPACITIVE MICROELECTROMECHANICAL SWITCHES WITH DYNAMIC SOFT-LANDING 有权
    具有动态软土功能的电容式微电子开关

    公开(公告)号:US20160141133A1

    公开(公告)日:2016-05-19

    申请号:US14881185

    申请日:2015-10-13

    CPC classification number: H01H59/0009 H03K17/975

    Abstract: A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.

    Abstract translation: 一种基于微机电系统(MEMS)的电气开关。 电开关包括可移动电极,介电层位于电介质层的第一侧上邻近可移动电极并且当可移动电极处于非活动位置时与可移动电极间隔开并且当可移动电极处于与可移动电极接触时 电极处于激活位置,并且在与第一侧相对的第二侧上附着到电介质层的基板,可移动电极被配置为在可动电极在非激活状态下切换之前与电介质层接触时制动 状态和激活状态。

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