公开(公告)号：US20040100680A1

公开(公告)日：2004-05-27

申请号：US10305509

申请日：2002-11-26

Applicant: REFLECTIVITY, INC., California corporation

Inventor： Andrew G. Huibers ,  Satyadev R. Patel ,  Robert M. Duboc JR.

IPC: G02B026/00

CPC classification number: G02B26/0841 ,  B82Y30/00 ,  Y10T428/30

Abstract: A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.