High voltage depletion mode MOS device with adjustable threshold voltage and manufacturing method thereof

    公开(公告)号:US11063148B2

    公开(公告)日:2021-07-13

    申请号:US15909277

    申请日:2018-03-01

    Abstract: A high voltage depletion mode MOS device with adjustable threshold voltage includes: a first conductive type well region; a second conductive type channel region, wherein when the channel region is not depleted, the MOS device is conductive, and when the channel region is depleted, the MOS device is non-conductive; a second conductive type connection region which contacts the channel region; a first conductive type gate, for controlling the conductive condition of the MOS device; a second conductive type lightly doped diffusion region formed under a spacer layer of the gate and contacting the channel region; a second type source region; and a second type drain region contacting the connection region but not contacting the gate; wherein the gate has a first conductive type doping or both a first and a second conductive type doping, and wherein a net doping concentration of the gate is determined by a threshold voltage target.

    HIGH VOLTAGE DEPLETION MODE MOS DEVICE WITH ADJUSTABLE THRESHOLD VOLTAGE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20180315851A1

    公开(公告)日:2018-11-01

    申请号:US15909277

    申请日:2018-03-01

    Abstract: A high voltage depletion mode MOS device with adjustable threshold voltage includes: a first conductive type well region; a second conductive type channel region, wherein when the channel region is not depleted, the MOS device is conductive, and when the channel region is depleted, the MOS device is non-conductive; a second conductive type connection region which contacts the channel region; a first conductive type gate, for controlling the conductive condition of the MOS device; a second conductive type lightly doped diffusion region formed under a spacer layer of the gate and contacting the channel region; a second type source region; and a second type drain region contacting the connection region but not contacting the gate; wherein the gate has a first conductive type doping or both a first and a second conductive type doping, and wherein a net doping concentration of the gate is determined by a threshold voltage target.

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