STRESS SENSOR AND FABRICATION METHOD FOR THE SAME
    1.
    发明申请
    STRESS SENSOR AND FABRICATION METHOD FOR THE SAME 审中-公开
    应力传感器及其制造方法

    公开(公告)号:US20160223413A1

    公开(公告)日:2016-08-04

    申请号:US14984696

    申请日:2015-12-30

    Applicant: ROHM CO., LTD.

    CPC classification number: G01L1/122 G01L1/2206

    Abstract: The stress sensor includes: a magnetic material; a stress applied portion on the magnetic material; a magnet disposed so as to be adjacent to by a magnetic material; a magnetic sensor disposed via the magnetic material so as to be opposed to the stress applied portion, wherein the magnetic sensor detects a magnetic flux emitted from a magnetic domain generated in the magnetic material by a local stress applied to the stress applied portion. The local stress or stress distribution can be detected with a convenience structure, and can obtain a high spatial resolution by using a stress response phenomenon of a single magnetic domain.

    Abstract translation: 该应力传感器包括:磁性材料; 应力施加部分在磁性材料上; 设置成与磁性材料相邻的磁体; 磁传感器,其经由磁性材料设置成与应力施加部分相对,其中,磁传感器通过施加到应力施加部分的局部应力来检测从磁性材料中产生的磁畴发射的磁通量。 局部应力或应力分布可以通过方便的结构进行检测,可以通过使用单个磁畴的应力响应现象获得高空间分辨率。

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