公开(公告)号：US06897994B2

公开(公告)日：2005-05-24

申请号：US10336413

申请日：2003-01-03

申请人： Ralph Thoma ,  Volker Melzer ,  Ronian Siew ,  Tobias Damm ,  Peter Mueller

发明人： Ralph Thoma ,  Volker Melzer ,  Ronian Siew ,  Tobias Damm ,  Peter Mueller

IPC分类号： G03F7/20 ,  G02B27/44 ,  G02B27/46 ,  G02B26/00

CPC分类号： G02B26/02 ,  G02B26/0808 ,  G02B27/4205 ,  G02B27/4244 ,  G02B27/425

摘要： An imaging system is disclosed that includes an illumination source, a diffractive modulator, imaging optics, and a coherence reduction system. The illumination source is for producing an illumination field. The diffractive modulator is for receiving the at least partially coherent illumination field and producing a modulated illumination field. The imaging optics are for directing the modulated illumination field toward an imaging surface. The coherence of one of the illumination field and the modulated illumination field is reduced.

摘要翻译： 公开了一种成像系统，其包括照明源，衍射调制器，成像光学器件和相干降低系统。 照明源用于产生照明场。 衍射调制器用于接收至少部分相干的照明场并产生调制的照明场。 成像光学器件用于将调制的照明场引导到成像表面。 降低了照明场和调制照明场之一的相干性。