公开(公告)号：US07252576B1

公开(公告)日：2007-08-07

申请号：US11358686

申请日：2006-02-21

申请人： Ranga Komanduri ,  Tejas Shrikant Kirtane ,  Robert Edward Gerlick ,  Noritsugu Umehara ,  Vijay Kumar Jain

发明人： Ranga Komanduri ,  Tejas Shrikant Kirtane ,  Robert Edward Gerlick ,  Noritsugu Umehara ,  Vijay Kumar Jain

IPC分类号： B24B1/00

CPC分类号： B24B1/005 ,  B24B11/02 ,  F16C33/32

摘要： A method of polishing workpieces in a magnetic float polishing chamber comprising a lower chamber piece and an upper chamber piece which is removably receivable in the lower chamber piece and is connected to a powered spindle for rotating the upper chamber piece in the polishing operation. The method preferably comprises one or more of the steps of (a) geometrically aligning the upper chamber piece with the powered spindle by machining the upper chamber piece in-situ, (b) machining the contact surface of the upper chamber piece in-situ between various polishing runs, and (c) mounting the lower chamber piece in a manner effective for causing the lower piece to automatically self-align coaxially with the upper chamber piece.

摘要翻译： 一种在磁浮浮抛光室中抛光工件的方法，包括下室件和可拆卸地容纳在下室件中的上室件，并连接到用于在抛光操作中旋转上室件的动力主轴。 该方法优选地包括以下步骤中的一个或多个步骤：（a）通过原位机械加工上部腔体部件，（b）在上部腔体部件的接触表面之间原位加工 各种抛光运行，以及（c）以有效地使下部件与上部腔体部件同轴自动自对准的方式安装下部腔体部件。