Method for controlling an amount of material delivered during a material transfer

    公开(公告)号:US06380495B1

    公开(公告)日:2002-04-30

    申请号:US09584884

    申请日:2000-06-01

    IPC分类号: G01G1302

    摘要: A method for controlling an amount of material delivered during a material transfer. This method includes the steps of inputting a target amount for a material to be delivered from a source location to a target location, updating the target amount during the delivery of the material using a predictive model-based algorithm, and updating the predictive model-based algorithm based on process performance data using a recursive least-squares procedure. An adaptive selection algorithm which is used to determine whether at least one previous predictive model-based algorithm parameter should be replaced with at least one new predictive model-based algorithm parameter in order to adapt the predictive model-based algorithm in response to a process change. A method for overlapping a delivery of at least one independently measured material with a delivery of a main material during a material transfer process.