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公开(公告)号:US20110278078A1
公开(公告)日:2011-11-17
申请号:US12777829
申请日:2010-05-11
CPC分类号: G01L1/146 , G06F3/0414 , G06F3/044 , G06F2203/04104 , G06F2203/04106 , H03K17/98
摘要: Devices and methods are provided that utilize a first electrode disposed on a first substrate and a second electrode disposed on a second substrate, where the first electrode and the second electrode define at least part of a variable capacitance. A third substrate is arranged between the first substrate and the second substrate, the third substrate having an opening arranged such that at least a portion of the first electrode and the second electrode overlap the opening. A transmission element is provided that partially overlaps the opening. The transmission element is physically coupled to the second electrode such that a force biasing the transmission element causes the second electrode to deflect relative to the first electrode, thus changing the variable capacitance. A measurement of the variable capacitance may then be used to determine force information.
摘要翻译: 提供了使用设置在第一基板上的第一电极和设置在第二基板上的第二电极的设备和方法,其中第一电极和第二电极限定可变电容的至少一部分。 第三基板布置在第一基板和第二基板之间,第三基板具有布置成使得第一电极和第二电极的至少一部分与开口重叠的开口。 提供了与开口部分重叠的传动元件。 传输元件物理耦合到第二电极,使得偏置传输元件的力使得第二电极相对于第一电极偏转,从而改变可变电容。 然后可以使用可变电容的测量来确定力信息。