公开(公告)号：US20160336140A1

公开(公告)日：2016-11-17

申请号：US15145107

申请日：2016-05-03

Applicant: Rigaku Corporation

Inventor： Masahiro NONOGUCHI ,  Manabu NOGUCHI ,  Koichi KATO ,  Ryuji NISHIDA ,  Yuji KUSAKA ,  Masashi KAGEYAMA ,  Tomohiro CHAKI

IPC: H01J35/14 ,  H01J35/02 ,  H05G1/26 ,  H01J35/08

CPC classification number: H01J35/14 ,  H01J35/025 ,  H01J35/08 ,  H01J2235/081 ,  H01J2235/086 ,  H01J2235/088 ,  H05G1/02 ,  H05G1/26

Abstract: Provided are an X-ray generator capable of easily measuring a beam size of an electron beam on an electron target, and an adjustment method therefor. The X-ray generator includes an electron target including a first metal, a second metal different from the first metal, and a third metal different from the second metal, which are sequentially arranged side by side along a first direction in a continuous manner.

Abstract translation: 提供能够容易地测量电子靶上的电子束的光束尺寸的X射线发生器及其调整方法。 X射线发生器包括：电子靶，其包括第一金属，不同于第一金属的第二金属和不同于第二金属的第三金属，其沿着第一方向以连续的顺序并排布置。