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1.发明授权System and method for separating a main pulse and a pre-pulse beam from a laser source 有权用于从激光源分离主脉冲和预脉冲光束的系统和方法公开(公告)号：US08681427B2
公开(公告)日：2014-03-25
申请号：US13535148
申请日：2012-06-27
IPC分类号： G02B27/14
CPC分类号： G02B27/145 , G02B26/0816 , G02B27/1006 , G02B27/141 , G03F7/70033 , H05G2/005 , H05G2/008
摘要： A dichroic beam splitter module is disclosed for separating a main pulse laser beam from a pre-pulse laser beam each traversing a common beam path. In one embodiment, two dichroic elements are physically aligned along the beam path and are configured to pass the pre-pulse, a laser light having a first wavelength, to target material located near an irradiation site yet reflect the main pulse, a laser light having a second wavelength. The reflected main pulse is then further reflected by two reflective elements or mirrors from the first dichroic element to the second dichroic element and then on to the irradiation site. In alternative embodiments, the first mirror is deformable to alter beam characteristics of the reflected main pulse beam and the second mirror is adjustable to align the main pulse beam to the irradiation site.
摘要翻译： 公开了用于将主脉冲激光束与每个穿过公共光束路径的预脉冲激光束分离的二向色光束分离器模块。 在一个实施例中，两个二向色元件沿着光束路径物理对齐，并且被配置为使具有第一波长的激光具有预脉冲，以将位于辐射位置附近的目标材料反射到主脉冲，激光具有 第二波长。 反射的主脉冲然后被两个反射元件或反射镜从第一二向色元件进一步反射到第二二向色元件，然后到照射部位。 在替代实施例中，第一镜可变形以改变反射的主脉冲光束的光束特性，并且第二反射镜是可调节的，以将主脉冲光束对准照射部位。
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2.发明申请System and Method for Separating a Main Pulse and a Pre-Pulse Beam from a Laser Source 有权从激光源分离主脉冲和预脉冲光束的系统和方法公开(公告)号：US20130321926A1
公开(公告)日：2013-12-05
申请号：US13535148
申请日：2012-06-27
IPC分类号： G02B27/14
CPC分类号： G02B27/145 , G02B26/0816 , G02B27/1006 , G02B27/141 , G03F7/70033 , H05G2/005 , H05G2/008
摘要： A dichroic beam splitter module is disclosed for separating a main pulse laser beam from a pre-pulse laser beam each traversing a common beam path. In one embodiment, two dichroic elements are physically aligned along the beam path and are configured to pass the pre-pulse, a laser light having a first wavelength, to target material located near an irradiation site yet reflect the main pulse, a laser light having a second wavelength. The reflected main pulse is then further reflected by two reflective elements or mirrors from the first dichroic element to the second dichroic element and then on to the irradiation site. In alternative embodiments, the first mirror is deformable to alter beam characteristics of the reflected main pulse beam and the second mirror is adjustable to align the main pulse beam to the irradiation site.
摘要翻译： 公开了用于将主脉冲激光束与每个穿过公共光束路径的预脉冲激光束分离的二向色光束分离器模块。 在一个实施例中，两个二向色元件沿着光束路径物理对齐，并且被配置为使具有第一波长的激光具有预脉冲，以将位于辐射位置附近的目标材料反射到主脉冲，激光具有 第二波长。 反射的主脉冲然后被两个反射元件或反射镜从第一二向色元件进一步反射到第二二向色元件，然后到照射部位。 在替代实施例中，第一镜可变形以改变反射的主脉冲光束的光束特性，并且第二反射镜是可调节的，以将主脉冲光束对准照射部位。
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