公开(公告)号：US07718985B1

公开(公告)日：2010-05-18

申请号：US11586975

申请日：2006-10-26

申请人： Robert Bernath ,  Christopher Brown ,  Joshua Duncan ,  Kazutoshi Takenoshita ,  Martin Richardson ,  Jose A. Cunado

发明人： Robert Bernath ,  Christopher Brown ,  Joshua Duncan ,  Kazutoshi Takenoshita ,  Martin Richardson ,  Jose A. Cunado

IPC分类号： H01J35/08

CPC分类号： H05G2/003 ,  H05G2/008

摘要： Methods, systems, apparatus, devices for tracking, controlling and providing feedback on droplets used in EUV source technology. The method and system track and correct positions of droplet targets and generated plasma including generating the droplet target or plasma, optically imaging the generated target, determining position coordinates, comparing the position coordinates to a set optimal position to determine if a deviation has occurred and moving the generated target back to the optimal position if the deviation has occurred. The optical imaging step includes activating a light source to image the generated target, the light source is strobed at approximately the same rate as the droplet production to provide illumination of the droplet for stroboscopic imaging. The step of moving is accomplished mechanically by moving the generated target back to the predefined position or electronically under computer control.

摘要翻译： 用于跟踪，控制和提供EUV源技术中使用的液滴反馈的方法，系统，设备，装置。 方法和系统跟踪和校正液滴目标和产生的等离子体的位置，包括产生液滴目标或等离子体，光学地成像生成的目标，确定位置坐标，将位置坐标与设定的最佳位置进行比较，以确定偏差是否发生和移动 如果发生偏差，则生成的目标返回到最佳位置。 光学成像步骤包括激活光源以对生成的目标进行成像，以与液滴产生大致相同的速率选择光源以提供用于频闪成像的液滴的照明。 移动的步骤是通过将生成的目标物回到预定位置或在计算机控制下以电子方式机械地实现的。