公开(公告)号：US6101419A

公开(公告)日：2000-08-08

申请号：US7378

申请日：1998-01-15

申请人： Robert D. Kennedy ,  Donald P. Richmond, II ,  Thane M. Koontz ,  Thomas W. Anderson

发明人： Robert D. Kennedy ,  Donald P. Richmond, II ,  Thane M. Koontz ,  Thomas W. Anderson

IPC分类号： G05B19/042 ,  G05B19/418 ,  G05B15/00

CPC分类号： G05B19/0423 ,  G05B19/41845 ,  Y02P90/16 ,  Y02P90/18

摘要： A modular control system for an automated manufacturing facility, especially for use with a semiconductor fabrication facility having a number of discrete process components, provides a master control computer connected by a parallel bus to a series of modular interface cards. Each of the interface cards are organized to communicate with all the I/O located on a specific process component or group of process components. A plurality of daughter cards are provided on each of the interface cards. The daughter cards contain data translation and acquisition circuitry for translating the various forms of I/O signals from and into a database format. The signal list used to communicate between the master computer and the I/O is generated at startup, enabling easy modification, addition and deletion of I/O. Network-based communication protocols can also be employed for communication between the interface cards and the master computer.

摘要翻译： 用于自动化制造设备的模块化控制系统，特别是与具有多个离散过程组件的半导体制造设备一起使用，提供通过并行总线连接到一系列模块化接口卡的主控制计算机。 每个接口卡被组织成与位于特定进程组件或一组进程组件上的所有I / O通信。 在每个接口卡上设置多个子卡。 子卡包含数据转换和采集电路，用于将各种形式的I / O信号从数据库格式转换成数据库格式。 用于在主计算机和I / O之间进行通信的信号列表在启动时生成，使得易于修改，添加和删除I / O。 基于网络的通信协议也可用于接口卡和主计算机之间的通信。