公开(公告)号：US06433480B1

公开(公告)日：2002-08-13

申请号：US09579875

申请日：2000-05-27

申请人： Robert H. Stark ,  Karl H. Schoenbach

发明人： Robert H. Stark ,  Karl H. Schoenbach

IPC分类号： H01J6104

CPC分类号： H01J61/64 ,  H01J61/09 ,  H05H1/48

摘要： This invention improves the stability and control of high-pressure glow discharges by means of a microhllow cathode discharge. The microhollow cathode discharge, which is sustained between two closely spaced electrodes with an opening formed in the electrodes, serves as a plasma cathode for the high-pressure glow. Small variations in the microhollow cathode discharge voltage generate large variations in the microhollow cathode discharge current and consequently in the glow discharge current. In this mode of operation the electrical characteristic of this invention resembles that of a vacuum triode. Using the microhollow cathode discharge as a plasma cathode, stable, dc discharges in argon up to atmospheric pressures can be generated. Additionally, parallel operation of these discharges allows for the generation of large volume plasmas at high gas pressure through superposition of individual glow discharges. Thus, this invention allows simultaneous generation of relatively high electron densities at relatively low temperatures with stable, direct current, homogenous glow discharge plasma at relatively high pressure.

摘要翻译： 本发明通过微阴极放电改善了高压辉光放电的稳定性和控制。 保持在具有在电极中形成的开口的两个紧密间隔的电极之间的微气体阴极放电用作用于高压发光的等离子体阴极。 微气体阴极放电电压的微小变化在微气体阴极放电电流和辉光放电电流中产生大的变化。 在这种操作模式下，本发明的电气特性类似于真空三极管的特征。 使用微空气阴极放电作为等离子体阴极，可以产生在氩气中稳定的直流放电至大气压力。 此外，这些放电的并联运行允许通过叠加单个辉光放电而在高气体压力下产生大体积等离子体。 因此，本发明允许在相对较低的温度下以相当高的压力同时产生具有稳定的直流均匀辉光放电等离子体的较高的电子密度。