PRESSURE SENSOR WITH CORRUGATED ISOLATOR SUPPORT

    公开(公告)号:US20240210263A1

    公开(公告)日:2024-06-27

    申请号:US18088181

    申请日:2022-12-23

    IPC分类号: G01L19/06 G01L19/14

    CPC分类号: G01L19/0645 G01L19/145

    摘要: A pressure sensor includes a header with a cavity, a pressure sensing element, an isolator, an isolator support, a damping gap, and oil. The pressure sensing element is in the cavity. The isolator has corrugations and is mounted to a top of the header. The isolator covers the cavity. The isolator support is in the cavity of the header above the pressure sensing element. The isolator support is corrugated. The corrugations of the isolator support align with the corrugations on the isolator. The damping gap is between the isolator support and the isolator. The damping gap has a constant width between the isolator support and the isolator. Oil fills the damping gap and the cavity in the header. The oil moves between the damping gap and the header cavity in response to external pressure changes moving the isolator.