公开(公告)号：US10041970B2

公开(公告)日：2018-08-07

申请号：US15326237

申请日：2015-07-14

申请人： Rutgers, The State University of New Jersey

发明人： Qingze Zou ,  Juan Ren ,  Jiangbo Liu

IPC分类号： G01Q10/00 ,  G01Q10/06 ,  G01Q60/34

摘要： A method for imaging a sample using a high speed dynamic mode atomic force microscope may include scanning a tip of a cantilever probe over a surface of the sample, regulating a vibration amplitude of the tip to remain constant at a set point value (Aset), via a first signal generated in a first feedback controller, measuring a mean tapping deflection of the tip, regulating the mean tapping deflection via a second signal generated in a second feedback controller, tracking and measuring an adjustment to the measured mean tapping deflection during the regulating. The method may further include generating an image topography of the sample based on the first signal, the second signal, and the measured adjustment of the mean tapping deflection of the cantilever probe.

公开(公告)号：US20170199219A1

公开(公告)日：2017-07-13

申请号：US15326237

申请日：2015-07-14

申请人： Rutgers, The State University of New Jersey

发明人： Qingze Zou ,  Juan Ren ,  Jiangbo Liu

IPC分类号： G01Q10/06 ,  G01Q60/34

CPC分类号： G01Q10/065 ,  G01Q60/34

摘要： A method for imaging a sample using a high speed dynamic mode atomic force microscope may include scanning a tip of a cantilever probe over a surface of the sample, regulating a vibration amplitude of the tip to remain constant at a set point value (Aset), via a first signal generated in a first feedback controller, measuring a mean tapping deflection of the tip, regulating the mean tapping deflection via a second signal generated in a second feedback controller, tracking and measuring an adjustment to the measured mean tapping deflection during the regulating. The method may further include generating an image topography of the sample based on the first signal, the second signal, and the measured adjustment of the mean tapping deflection of the cantilever probe.