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    Time based mass flow controller and method for controlling flow rate using it
    3.
    发明授权
    Time based mass flow controller and method for controlling flow rate using it 失效
    基于时间的质量流量控制器和使用它控制流量的方法

    公开(公告)号：US06782906B2

    公开(公告)日：2004-08-31

    申请号：US10112692

    申请日：2002-03-29

    申请人： Young-Chul Chang

    发明人： Young-Chul Chang

    IPC分类号： G05D706

    CPC分类号： G05D7/0647 ,  Y10T137/0368 ,  Y10T137/7759 ,  Y10T137/7761

    摘要： A time based mass flow controller controls the volume flow and mass flow accurately based on time. The time based mass flow controller includes at least one reservoir 1, at least one inlet valve 13, each inlet valve 13 opening/closing an inlet of a corresponding reservoir 1, at least one outlet valve 3, each outlet valve 3 opening/closing an outlet of a corresponding reservoir 1, at least one pressure sensor, each pressure sensor detecting the gas pressure in each corresponding reservoir, and a controller for controlling the number of opening/closing loops of the inlet valve 13 and the outlet valve 3 per unit time and/or mass/volume of gas stored and discharged at the reservoir 1 per unit opening/closing loop of the inlet valve 13 and the outlet valve 3, with the inlet valve 13 opening the inlet of the reservoir 1 to allow the gas to flow into the reservoir 1 when the outlet valve 3 is in a closed state, and thereafter the outlet valve 3 opening the outlet of the reservoir 1 to allow the gas to flow out from the reservoir 1 when the inlet valve 13 is in a closed state, so that the controller may control the mass/volume flow rate of the outflow gas from the reservoir 1.

    摘要翻译： 基于时间的质量流量控制器基于时间精确地控制体积流量和质量流量。 基于时间的质量流量控制器包括至少一个储存器1，至少一个入口阀13，每个入口阀13打开/关闭相应储存器1的入口，至少一个出口阀3，每个出口阀3打开/关闭 相应的储存器1的出口，至少一个压力传感器，每个压力传感器检测每个对应储存器中的气体压力，以及控制器，用于每单位时间控制入口阀13和出口阀3的打开/关闭回路的数量 和/或在入口阀13和出口阀3的每单位打开/关闭回路中在储存器1处储存和排出的气体的质量/体积，其中入口阀13打开储存器1的入口以允许气体流动 当出口阀3处于关闭状态时，进入贮存器1，此后，当入口阀13处于关闭状态时，出口阀3打开储存器1的出口以允许气体从储存器1流出， 所以c 控制器可以控制来自储存器1的流出气体的质量/体积流量。

    Mechanical Synchronized Mass Flow Controller
    4.
    发明申请
    Mechanical Synchronized Mass Flow Controller 审中-公开
    机械同步质量流量控制器

    公开(公告)号：US20080016956A1

    公开(公告)日：2008-01-24

    申请号：US11667588

    申请日：2005-11-11

    申请人： Young-Chul Chang

    发明人： Young-Chul Chang

    IPC分类号： G05D7/00

    CPC分类号： G05D7/0635

    摘要： The mechanical synchronized time-based mass flow controller can control the flow rate easily and precisely. The mechanical synchronized time-based mass flow controller includes a reservoir 1a, 1b, an inlet line 14, an outlet line 24, a valve 3 and a control unit. The valve 3 has a passage 3a through which the fluid passes and operates in a mechanical cycle which includes an inlet line open period when the passage 3a is communicated with the inlet line 14 and the inlet line 14 is in an open state and an outlet line open period when the passage 3a is communicated with the outlet line 24 and the outlet line 24 is in an open state according to change of position of the passage 3a, the inlet line open period and the outlet line open period coming out of phase with each other so that the inlet line 14 can be opened when the outlet line 24 is in a closed state and the outlet line 24 can be opened when the inlet line 14 is in a closed state. The control unit controls cycle rate of the valve 3 and/or mass/volume of the fluid stored and discharged at the reservoir 1a, 1b per unit opening/closing cycle of the valve 3, to control mass/volume flow rate of the outflow fluid from the reservoir 1a, 1b.

    摘要翻译： 机械同步时基质量流量控制器可以方便，准确地控制流量。 机械同步的基于时间的质量流量控制器包括储存器1a，1b，入口管线14，出口管线24，阀3和控制单元。 阀3具有通道3a，流体通过该通道，并以机械循环操作，该机械循环包括当通道3a与入口管线14连通并且入口管线14处于打开状态时的入口管路开放时段， 当通道3a与出口管线24连通并且出口管线24根据通道3a的位置变化处于打开状态时，出口管线打开时段，入口管线打开时段和出口管路开放时段出来 使得当出口管线24处于关闭状态时入口管线14可以打开，并且当入口管线14处于关闭状态时出口管线24可以打开。 控制单元控制阀3的循环速率和/或在阀3的每单位打开/关闭循环中在储存器1a，1b处储存和排出的流体的质量/体积，以控制阀3的质量/体积流量 来自储存器1a，1b的流出流体。