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公开(公告)号:US20200030847A1
公开(公告)日:2020-01-30
申请号:US16337672
申请日:2017-09-29
Applicant: SABIC GLOBAL TECHNOLOGIES B.V.
Inventor: Shahram SHAFAEI , Robert Dirk VAN DE GRAMPEL
Abstract: A composite material, and methods of making thereof, include a polycarbonate substrate and plasma-enhanced chemical vapor deposition formed layers. In particular, a film formed by a process of plasma-enhanced chemical vapor deposition includes: applying a radio frequency bias to a substrate; and supplying a process gas through an antennae, where microwave power applied to the antennae generates plasma of the process gas at the surface of the substrate thereby forming one or more layers on the substrate. In certain aspects the film exhibits one or more (or all) of favorable oxygen transmission rate, barrier improvement factor, optical transmission, surface roughness, chemical resistance and surface roughness properties.