公开(公告)号：US20190003040A1

公开(公告)日：2019-01-03

申请号：US15780338

申请日：2016-11-28

Applicant: SABIC Global Technologies B.V.

Inventor： Huazhen YAO ,  Hengjie LAI ,  Chao LIU ,  Yaming NIU ,  Siguang JIANG ,  Ashir THAKORE

IPC: C23C14/56 ,  C23C14/34 ,  C23C14/02 ,  G02B1/14 ,  G02B1/118

Abstract: A device and a process for applying multiple plasma coating layers in a vacuum, and a product created from that process. The process includes disposing a substrate in a vacuum chamber and applying multiple plasma coating layers to the substrate without breaking vacuum.