公开(公告)号：US20140076432A1

公开(公告)日：2014-03-20

申请号：US14033391

申请日：2013-09-20

申请人： SAMSUNG CORNING PRECISION MATERIALS CO., LTD.

发明人： Joo Young LEE ,  Young Zo YOO ,  Seo Hyun KIM ,  Jeong Woo PARK ,  June Hyoung PARK ,  Il Hee BAEK ,  Gun Sang YOON ,  Hyun hee LEE ,  Eun Ho CHOI

IPC分类号： F16L41/02

CPC分类号： F16L41/02 ,  C23C16/45563 ,  C23C16/45578 ,  H01J37/3244 ,  Y10T137/85938

摘要： A gas injector which can inject at a uniform velocity and an injector pipe used for the same. The gas injector includes a body, a gas flow path formed inside the body, the gas flow path extending from one end to the other end in a lengthwise direction of the body, a blade formed inside the body and connected to the gas flow path so as to inject gas, and an injector pipe inserted into the gas flow path. The injector pipe receives the gas from the gas supply, and distributes the gas through a plurality of holes to the gas flow path. The plurality of holes of the injector pipe include a plurality of first holes and a plurality of second holes which are formed along two parallel lines extending in the lengthwise direction of the injector pipe, the first holes alternating with the second holes.

摘要翻译： 可以以均匀的速度喷射的气体喷射器和用于其的喷射器管。 气体喷射器包括主体，形成在主体内部的气体流动路径，气体流动路径沿着主体的长度方向从一端延伸到另一端，形成在主体内并连接到气体流动路径的叶片 注入气体，以及插入到气体流路中的喷射管。 注入管接收来自气体供应源的气体，并将气体通过多个孔分配到气体流路。 喷射器管的多个孔包括多个第一孔和多个第二孔，沿着沿喷射管的长度方向延伸的两条平行线形成，第一孔与第二孔交替。