公开(公告)号：US20180123486A1

公开(公告)日：2018-05-03

申请号：US15797488

申请日：2017-10-30

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Min Ho BAE ,  Byung-Moo KIM ,  Yun Soo KIM ,  Tae-Ho YOUN

IPC: H02N13/00 ,  H01L21/683

CPC classification number: H02N13/00 ,  H01L21/681 ,  H01L21/6831 ,  H01L21/6833 ,  H01L21/68757

Abstract: An electrostatic chuck and an electrostatic adsorption apparatus are provided. According to one or more exemplary embodiments, an electrostatic chuck includes: a main body portion including a body portion provided with a through-hole, and a transparent resin portion filled in the through-hole; a transparent cushion layer on the main body portion and covering the transparent resin portion; an electrode layer on the transparent cushion layer; and a dielectric layer on the electrode layer.