公开(公告)号：US20170252774A1

公开(公告)日：2017-09-07

申请号：US15265868

申请日：2016-09-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Heung Yeol NA ,  Dong Wook KIM ,  Jae Wan SEOL ,  Seong Ho JEONG

IPC: B05D1/00

CPC classification number: C23C14/12 ,  C23C14/243 ,  G06F3/00 ,  H01L51/001

Abstract: A method of manufacturing a display device is provided. A method of manufacturing a display device comprises preparing a thin film forming apparatus including a crucible, which stores a source material for forming a thin film, and a front heatsink, which is disposed on the crucible and includes a reflective plate, wherein the reflective plate has a first surface with a first reflectivity and a second surface with a second reflectivity, which is different from the first reflectivity; andforming a thin film on a substrate by evaporating the source material of the thin film forming apparatus.