公开(公告)号：US20160285052A1

公开(公告)日：2016-09-29

申请号：US14936585

申请日：2015-11-09

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Duckjung Lee ,  Kiyoung Yun ,  Jungsun Park

IPC: H01L51/56 ,  H02N13/00 ,  H01L51/52 ,  H01L21/683 ,  H01L27/32

CPC classification number: H01L51/56 ,  H01L21/6831 ,  H01L21/6833 ,  H01L27/3211 ,  H01L51/5256 ,  H01L2251/5338 ,  H02N13/00

Abstract: Provided are an electrostatic chuck system and a method of manufacturing an organic light-emitting display apparatus by using the electrostatic chuck system. The electrostatic chuck system comprises: a stage in which a first electrode and a second electrode are arranged, the first electrode having a first polarity and the second electrode having a second polarity that is different from the first polarity; a display substrate on the stage, the display substrate including a pixel electrode on a surface thereof; and an optical mask over the surface of the display substrate, the optical mask including a reflection layer and a transfer layer to be transferred to the display substrate, wherein the display substrate has one of the first and second polarities, and the optical mask has the other of the first and second_polarities as the display substrate.

Abstract translation: 提供一种静电吸盘系统和通过使用静电吸盘系统制造有机发光显示装置的方法。 静电卡盘系统包括：第一电极和第二电极布置在其中，第一电极具有第一极性，第二电极具有与第一极性不同的第二极性; 所述显示基板在所述平台上，所述显示基板在其表面上包括像素电极; 以及在所述显示基板的表面上的光掩模，所述光掩模包括反射层和要转印到所述显示基板的转印层，其中所述显示基板具有所述第一和第二极性中的一个，并且所述光学掩模具有 第一和第二极性中的另一个作为显示基板。

公开(公告)号：US09530988B2

公开(公告)日：2016-12-27

申请号：US14936585

申请日：2015-11-09

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Duckjung Lee ,  Kiyoung Yun ,  Jungsun Park

IPC: H01L51/40 ,  H01L51/56 ,  H01L21/683 ,  H01L27/32 ,  H01L51/52 ,  H02N13/00

CPC classification number: H01L51/56 ,  H01L21/6831 ,  H01L21/6833 ,  H01L27/3211 ,  H01L51/5256 ,  H01L2251/5338 ,  H02N13/00

Abstract: Provided are an electrostatic chuck system and a method of manufacturing an organic light-emitting display apparatus by using the electrostatic chuck system. The electrostatic chuck system comprises: a stage in which a first electrode and a second electrode are arranged, the first electrode having a first polarity and the second electrode having a second polarity that is different from the first polarity; a display substrate on the stage, the display substrate including a pixel electrode on a surface thereof; and an optical mask over the surface of the display substrate, the optical mask including a reflection layer and a transfer layer to be transferred to the display substrate, wherein the display substrate has one of the first and second polarities, and the optical mask has the other of the first and second polarities as the display substrate.

Abstract translation: 提供一种静电吸盘系统和通过使用静电吸盘系统制造有机发光显示装置的方法。 静电卡盘系统包括：第一电极和第二电极布置在其中，第一电极具有第一极性，第二电极具有与第一极性不同的第二极性; 所述显示基板在所述平台上，所述显示基板在其表面上包括像素电极; 以及在所述显示基板的表面上的光掩模，所述光掩模包括反射层和要转印到所述显示基板的转印层，其中所述显示基板具有所述第一和第二极性中的一个，并且所述光学掩模具有 第一和第二极性中的另一个作为显示基板。