公开(公告)号：US20250149371A1

公开(公告)日：2025-05-08

申请号：US18931528

申请日：2024-10-30

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： TAEYOUNG PARK ,  MINSEOK KANG ,  MYUNG-HUN OH ,  TETSUYA OKAMOTO ,  BYUNG MOO KIM

IPC: H01L21/683 ,  B23Q3/15 ,  B32B37/00 ,  B32B37/10

Abstract: An electrostatic chuck unit includes a first electrostatic chuck that includes a first plate that includes a surface that is concavely curved in a first direction and a first electrode pattern disposed on the surface of the first plate, and a second electrostatic chuck spaced apart from the first electrostatic chuck in a second direction opposite to the first direction and that includes a second plate that includes a surface adjacent to the first electrostatic chuck and that is convexly curved in the first direction and a second electrode pattern disposed on the surface of the second plate. Each of the first electrode pattern and the second electrode pattern includes an electrode, and a width of the electrode is between 10 mm and 30 mm.