FIXING JIG AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

    公开(公告)号:US20250162200A1

    公开(公告)日:2025-05-22

    申请号:US18948139

    申请日:2024-11-14

    Abstract: A fixing jig includes a body portion, an insertion portion extending from the body portion along a first direction and a cover portion extending from the body portion along the first direction, spaced apart from the insertion portion along a second direction intersecting the first direction. The cover portion includes a first surface and a second surface opposite to the first surface. The second surface of the cover portion faces the insertion portion, and second surface of the cover portion includes a groove.

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