公开(公告)号：US20210327927A1

公开(公告)日：2021-10-21

申请号：US17074947

申请日：2020-10-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： YONG-HWAN RYU ,  Woo Jin Cho ,  Jong-Hyun Choung ,  Jae Uoon Kim ,  Sun-Jin Song ,  Hyun Duck Cho

IPC: H01L27/12 ,  G03F7/038

Abstract: A method of manufacturing a display device in a chamber in which a material including yttrium is coated on an inner surface includes: forming a first layer pattern by dry etching on a substrate; depositing a second layer material on the first layer pattern; forming a photoresist pattern on the second layer material; completing a second layer pattern by using the photoresist pattern as an etch mask; and performing an additional acid etching process by using an etching solution including at least one of hydrochloric acid, sulfuric acid, or nitric acid before the forming of the photoresist pattern on the second layer material after the dry etching to form the first layer pattern.

公开(公告)号：US20170242515A1

公开(公告)日：2017-08-24

申请号：US15429736

申请日：2017-02-10

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JUNGHA SON ,  JAENEUNG KIM ,  YONG-HWAN RYU ,  SANGKYU CHOI ,  JIHUN KIM ,  HANYUNG JUNG

IPC: G06F3/041 ,  G06F3/047

CPC classification number: G06F3/0412 ,  G06F1/1626 ,  G06F3/0416 ,  G06F3/044 ,  G06F3/047 ,  G06F2203/04102 ,  G06F2203/04103

Abstract: Provided is a touch member includes a folding region folded around a folding axis and a non-folding region adjacent to the folding region. The touch member includes a first conductive pattern disposed in the folding region and a second conductive pattern disposed in the non-folding region. The touch member also includes an air gap defined inside the first conductive pattern. The touch member is configured to detect an external signal