公开(公告)号：US20170253958A1

公开(公告)日：2017-09-07

申请号：US15267399

申请日：2016-09-16

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sok Won NOH ,  Do Young KIM ,  Kook Chol PARK ,  Zin Seok YOON

IPC: C23C14/24 ,  C23C14/54

CPC classification number: C23C14/243 ,  H01L51/001

Abstract: A method of manufacturing a display device includes providing a deposition source and a substrate facing each other, the deposition source including a rotating rod, an internal module engaged with the rotating rod and having a storage unit for storing a deposition material, and an external housing covering the rotating rod and the internal module and having an outlet communicating with ambient air, rotating the rotating rod in the deposition source, such that the internal module engaged with the rotating rod is rotated, and applying the deposition material discharged through the outlet of the external housing onto the substrate.