公开(公告)号：US20240356524A1

公开(公告)日：2024-10-24

申请号：US18584444

申请日：2024-02-22

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Won HAN ,  Sang Uk SON ,  Jong Woon KIM ,  Sungwook KIM ,  Jeong Hoon RYOU ,  Daehun JEONG ,  Jung-Eun YOUM ,  Sangheon HAN ,  Jeonga KIM ,  Hwasun LEE

IPC: H03H9/17 ,  H03H9/02

CPC classification number: H03H9/173 ,  H03H9/02118 ,  H03H9/02157

Abstract: A bulk acoustic resonator includes a resonance portion including a first electrode, a piezoelectric layer disposed on the first electrode along a height direction, and a second electrode disposed on the piezoelectric layer along the height direction. The resonance portion includes an overlapping region in which the first electrode, the piezoelectric layer, and the second electrode overlap each other along the height direction. The overlapping region includes a central portion and an edge portion disposed outside the central portion, and including a first edge portion and a second edge portion. A height of the second electrode of the first edge portion and a height of the second electrode of the second edge portion are lower than a height of the second electrode of the central portion along the height direction, and are different from each other along the height direction.