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公开(公告)号:US20230016186A1
公开(公告)日:2023-01-19
申请号:US17678392
申请日:2022-02-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Min Sung KANG , Hyoung Yol MUN , Jun U JIN , Bo Hyun KIM , Sung Dong CHO , Won Hee CHO
IPC: H01L23/00
Abstract: A semiconductor device includes a substrate. A conductive layer is disposed on the substrate and extends in a first direction. An insulating layer is disposed on the conductive layer and exposes at least a portion of the conductive layer through a via hole. The via hole includes a first face extending in a first slope relative to a top face of the conductive layer. A second face extends in a second slope relative to the top face of the conductive layer that is less than the first slope. A redistribution conductive layer includes a first pad area disposed in the via hole. A line area at least partially extends along the first face and the second face. The first face directly contacts the conductive layer. The second face is positioned at a higher level than the first face in a second direction perpendicular to a top face of the substrate.