公开(公告)号：US20250035564A1

公开(公告)日：2025-01-30

申请号：US18441476

申请日：2024-02-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Il Choi ,  Byeongkwan Song ,  Chulmoo Kang ,  Kang-Woong Ko ,  Kyungbeom Kim ,  Mira Park ,  Yongseok Won ,  Younsub Lee ,  Jeonghoo Jo

IPC: H01L21/66 ,  G06T7/00 ,  G06T7/13

Abstract: The present disclosure relates to substrate test methods. An example substrate test method comprises loading a substrate into a substrate test apparatus and testing the substrate in the substrate test apparatus. The step of testing the substrate includes testing a first region of the substrate, and testing a second region of the substrate after testing the first region. The step of testing the first region includes determining that the first region is aligned and irradiating light to the first region. The step of testing the second region includes determining that the second region is aligned and irradiating light to the second region.