公开(公告)号：US20210262081A1

公开(公告)日：2021-08-26

申请号：US16920913

申请日：2020-07-06

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Minsung Lee ,  Youngkwan Cha ,  Yountaek Ryu ,  Kyungwoo Park ,  Woonyoung Choi ,  Ducksu Kim ,  Jeongyub Lee ,  Changseung Lee

IPC分类号： C23C14/54 ,  C23C14/04 ,  C23C14/34

摘要： A deposition apparatus forms a material layer on a substrate in a deposition chamber. Provided in the deposition chamber are at least one deposition material providing device that provides a deposition material to the substrate, a deposition mask that defines a deposition area on the substrate, and a stage that supports the substrate. The stage is movable in X and Y directions in a plane parallel to the substrate.