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公开(公告)号:US20250016993A1
公开(公告)日:2025-01-09
申请号:US18428207
申请日:2024-01-31
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung-Hwan JANG , Guifu YANG , Jinbum KIM , Sunguk JANG
IPC: H10B12/00
Abstract: A semiconductor device includes a substrate including a recess region; a bit line contact in the recess region; a bit line on the bit line contact, the bit line extending in a first direction; a first insulating pattern covering side surfaces of the bit line contact and an inner surface of the recess region; and a second insulating pattern on the first insulating pattern, wherein an oxygen density of the first insulating pattern is higher than an oxygen density of the second insulating pattern.