公开(公告)号：US20150370246A1

公开(公告)日：2015-12-24

申请号：US14596405

申请日：2015-01-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Nam-Su YUK ,  Jae-Won JEONG ,  Ho-Youl LEE ,  Ju-No PARK ,  Jae-Young EOM

IPC: G05B19/418

CPC classification number: H01L21/681 ,  H01L21/67242 ,  H01L21/67259

Abstract: A substrate transporting apparatus includes a first light emitting sensor emitting a first sensing light in a first direction, a first light receiving sensor receiving the first sensing light, a second light emitting sensor emitting a second sensing light in a second direction different than the first direction, a second light receiving sensor receiving the second sensing light, a substrate transporting loader passing through traveling lines of the first sensing light and the second sensing light, a state information storage unit storing state information of the substrate transporting loader, and an operation information computing unit computing operation information of the substrate transporting loader based on the state information.

Abstract translation: 基板传送装置包括：第一发光传感器，其沿第一方向发射第一感测光，第一光接收传感器接收第一感测光;第二发光传感器，沿与第一方向不同的第二方向发射第二感测光 ，接收第二感测光的第二光接收传感器，穿过第一感测光和第二感测光的行进线的衬底传送装载器，存储衬底传送装载器的状态信息的状态信息存储单元和操作信息计算 基于状态信息的基板输送装载机的单元计算运算信息。

公开(公告)号：US20190137451A1

公开(公告)日：2019-05-09

申请号：US16055409

申请日：2018-08-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kyoung-Whan OH ,  Won-Yup KO ,  Won-Ki PARK ,  Ho-Youl LEE ,  Young-IL JANG ,  Yeon-Woo CHOI ,  Yong-Won CHOI

IPC: G01N29/04 ,  G01N29/34 ,  G01N29/14

Abstract: A method for determining a position of a fault of equipment includes receiving a plurality of sound source signals from a plurality of sound source inputting apparatuses, determining an abnormal operation of the equipment by analyzing at least one sound source signal among the sound source signals, and extracting abnormal sound source signals from the sound source signals. The abnormal sound source signals are indicative of abnormal operation of the equipment. The method further includes determining a position of the abnormal operation based on a time difference between the abnormal sound source signals.