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公开(公告)号:US20250140723A1
公开(公告)日:2025-05-01
申请号:US18671443
申请日:2024-05-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jihoon KIM , Jinkyeong SEOL , Raeyoung KANG , Minki KIM , Hyeonkyu HA
IPC: H01L23/00 , H01L23/48 , H01L25/065 , H10B80/00
Abstract: A semiconductor package includes a plurality of semiconductor chips bonded to each other through direct bonding, the plurality of semiconductor chips including a first semiconductor chip and a second semiconductor chip. The first semiconductor chip including: a front insulating layer bonded to a back insulating layer of the second semiconductor chip; a front pad surrounded by the front insulating layer; a device layer on a back surface of the front insulating layer and including an interconnection structure electrically connected to the front pad; a conductive pattern between the interconnection structure and the front pad; and a support insulating layer between the device layer and the front insulating layer and surrounding the conductive pattern, wherein a gap is between a first side surface of the support insulating layer and a second side surface of the conductive pattern that faces the first side surface.