公开(公告)号：US20200070223A1

公开(公告)日：2020-03-05

申请号：US16374871

申请日：2019-04-04

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyun-Joo JEON ,  Dae-Sung KIM ,  Seung-Han LEE ,  Sung-Hyup KIM

IPC: B08B13/00 ,  B05C11/00 ,  B08B3/02 ,  B65G65/00

Abstract: A jig configured to clean a bowl of a spin coater includes a base disposed on a spin chuck of the spin coater, the base being configured to rotate by the spin chuck. The jig further includes a guide member extending in a first direction from an edge portion of the base toward an inner cover of the bowl and configured to guide a lower cleaning agent injected to a lower surface of the base to the inner cover of the bowl. The inner cover of the bowl is configured to receive photoresist from under the spin chuck.