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公开(公告)号：US20250022693A1
公开(公告)日：2025-01-16
申请号：US18428510
申请日：2024-01-31
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Iksu BYUN , Songyun KANG , Youngrok KWON
IPC: H01J37/32 , H01L21/683
Abstract: An electrostatic chuck may include a body, a body; an internal electrode in the body, wherein the internal electrode is configured to generate an electrostatic force when a voltage is applied to the internal electrode; and a coating layer on an outer surface of the body, wherein the coating layer comprises a film forming material including a silicon-containing material.
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