公开(公告)号：US20130316628A1

公开(公告)日：2013-11-28

申请号：US13787028

申请日：2013-03-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Young-Seok JANG ,  Young-Ho KOH ,  Jae-Sun KIM ,  Kuen-Byul KIM ,  Jae-Chang LEE ,  Min-Sung HEO ,  Jin-Suk HONG ,  Jae-Dong LEE

IPC: B24B37/30

CPC classification number: B24B37/30

Abstract: A flexible membrane for a polishing head includes a main part having a first surface configured to make contact with a surface of a substrate and a second surface opposite to the first surface, a plurality of extensions extending substantially perpendicularly from the second surface of the main part so as to define a plurality of independent spaces, respectively, and an inner ring coupled with an inner side of an outermost extension of the extensions to support an edge portion of the main part. A bottom surface of the inner ring is substantially flat.

Abstract translation: 一种用于抛光头的柔性膜包括：主要部分，其具有构造成与基板的表面接触的第一表面和与第一表面相对的第二表面;多个延伸部，从主要部分的第二表面基本垂直延伸; 以便分别限定多个独立空间，以及与所述延伸部的最外延伸部的内侧联接的内环，以支撑主要部分的边缘部分。 内圈的底面基本上是平的。