DUAL CHILLER SYSTEM
    4.
    发明申请

    公开(公告)号:US20240377113A1

    公开(公告)日:2024-11-14

    申请号:US18615635

    申请日:2024-03-25

    Abstract: A dual chiller system includes a high-temperature tank configured to supply a first coolant of a first temperature to the outside, a low-temperature tank configured to supply a second coolant of a second temperature lower than the first temperature to the outside, a first automatic inlet valve and a second automatic inlet valve respectively connected to the high-temperature tank and the low-temperature, a first substrate processing device configured to receive the first coolant or the second coolant from the first automatic inlet valve and a second substrate processing device configured to receive the first coolant or the second coolant from the second automatic inlet valve, a cooling unit and a system controller.

    Omni-directional wheel and moving device including the same

    公开(公告)号:US11453237B2

    公开(公告)日:2022-09-27

    申请号:US16672749

    申请日:2019-11-04

    Abstract: An omni-directional wheel includes: a center wheel configured to rotate about a first rotation axis extending in a first direction; a plurality of peripheral wheels arranged along a circumference of the center wheel and configured to rotate about a second rotation axis extending in a second direction different from the first direction; and a plurality of variable supports provided on the center wheel and configured to respectively support the plurality of peripheral wheels. At least one of the plurality of variable supports is configured to absorb, when an impact force is applied to at least one of the plurality of peripheral wheels being supported by the at least one of the plurality of variable supports, the impact by changing a distance between the center wheel and the at least one of the plurality of peripheral wheels.

Patent Agency Ranking